For system availability for manufacturers of semiconductors, Festo Automated solutions that are both reliable and economical are available in just one quick call.
Valve terminal VTOC
The compact pilot valve terminal for a wide variety of pneumatic applications for reliably controlling pneumatic media valves. Plus interlock option for greater safety. Controlled via multi-pin or fieldbus interface, the VTOC is also suitable for IO-Link®.
Valve terminals VTUG
Valve terminal VTUG with multi-pin or fieldbus interface. Compact, universal, with high flow rates. Optimized valve terminal variants for installation in control cabinets, with manifold rail for increased corrosion protection. Also with hot swap function for replacing valves without interrupting the ongoing process.
Quarter turn actuator DFPD
The DFPD series features a rack and pinion combination with a constant torque characteristic across the entire swivel range. The quarter turn actuators DFPD are perfect for automating your butterfly valves, ball valves and dampers.
Ball valve VZBF
The two-part stainless steel ball valve for liquid and gaseous media is easy to maintain. Its fire safe design complies with the requirements of API 607.
Angle seat valve VZXA
Extremely high flow rates, an easy-to-clean design and a modular structure. You can combine valve bodies and actuators to suit your application and make it more flexible.
Pinch valve VZQA
Normally closed or normally open? The choice is yours. With the pinch valve VZQA, you can control media flows such as granulate, fluids containing solids and highly viscous or abrasive media even better. The compact valve is quick to install, easy to clean and offers modular configuration.
Solenoid valve VZWF
The force pilot operated pneumatic valves VZWF control high pressures with high nominal diameters using relatively small solenoids, even in closed media circuits with no differential pressure.
Proportional-pressure regulator VEAB
For pressure ranges up to 6 bar: piezo technology makes the VEAB extremely precise and gives it a very long service life. Other benefits include extremely short switching times, quiet operation and very low power consumption.
Proportional-pressure regulator VEAA
For pressure ranges up to 10 bar: piezo technology makes the VEAA extremely precise and gives it a very long service life. Other benefits include extremely short switching times, quiet operation and very low power consumption.
Valve terminal type CPX-MPA
Valve terminal type CPX-MPA, if additional I/Os are required, for example to control electric valves, integrate sensors or create closed-loop control circuits. With this terminal, diagnostics and remote maintenance functions can also be carried out.
Flow sensor SFAW
Simple monitoring with the flow sensor SFAW as it measures the flow rate, consumption and temperature of liquid media. Its easy operation and easily readable display make the SFAW highly reliable.
Pressure sensor SPAW
For hydraulic and pneumatic applications: the compact pressure sensor SPAW has 9 measuring ranges from −1 … 1 and 0 … 100 bar. Suitable for all media, such as water, coolants or gases, that don’t corrode the stainless steel housing and the measuring element.
Above are just examples of Festo products in the Semicon industry. Know that Festo has a broad product portfolio for machines used in the manufacture of electronic components. Please contact us and our Festo Sales and Application Engineer will be happy to talk to you.
