The HEPA/ULPA rooms are found in the space above a semiconductor cleanroom. This area has filtration equipment that removes particulates from the outside environment. A HEPA (high efficiency particulate air) filter and/or an ULPA (ultra low particulate air) filter is used to trap small contaminants and prevent them from entering the fab cleanroom area. The … Continue reading Dwyer Instruments Monitoring Solutions for Semiconductor HEPA/ULPA Rooms